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Overview
Image Measurement System
Displacement Sensor
Spectral Interferometer
Optical Micrometer
Inductive Displacement
Contact Sensor
IM-6500 Series
SI-F Series
SI-F80R Series
LJ-G Series
LK-G5000 Series
LK-G Series
LK / LK-2500 Series
LT-9000 Series
LB-1000W Series
TM-3000 Series
LS-7000 Series
IG Series
LS-5000 Series
EX-V Series
EX-500 Series
EX-200 Series
RD Series
GT2 Series
Product Overview
Keyence Measurement Systems for All Applications
Image Measurement System
Model
Mode
Field of view
Repetition Accuracy
Measurement
accuracy
Light receiving lens
NEW
IM-6500 Series
Learn More
IM-6010
Wide-field
measurement mode
ø100 mm
ø3.94"
±1 μm
±0.04Mil
±5 μm
±0.2Mil
Double
telecentric
lens
High-precision
measurement mode
-
-
-
IM-6020
Wide-field
measurement mode
ø100 mm
ø3.94"
±1 μm
±0.04Mil
±5 μm
±0.2Mil
High-precision
measurement mode
ø25 mm
ø0.98"
±0.5 μm
±0.02Mil
±2 μm
±0.08Mil
Laser Displacement Sensor
Target
Model
Features
Shape
Measuring
distance/range
Resolution
Smallest
spot size
Linearty
FDA
Laser
class
All
Objects
LJ-G Series
Learn More
LJ-G015K
Ultra high-accuracy regular reflection
Z axis:
15 ± 2.3mm
0.59 ± 0.09"
X axis :
7mm
0.28"
Z axis:
0.2μm
0.008 Mil
X axis :
2.5μm
0.1 Mil
Approx. 32 μm x 12 mm
1.26 Mil x 0.47"
±0.1% of F.S.
II
LJ-G015
Ultra high-accuracy
Z axis:
15 ± 2.6mm
0.59 ± 0.1"
X axis :
7mm
0.28"
LJ-G030
High-accuracy
Z axis:
30 ± 10mm
1.18 ± 0.39"
X axis :
22mm
0.87"
Z axis:
1μm
0.04 Mil
X axis :
5μm
0.2 Mil
Approx. 40 μm x 25 mm
1.56 Mil x 0.98"
±0.1% of F.S.
II
LJ-G080
Mid-range
Z axis:
80 ± 23mm
3.15 ± 0.91 "
X axis :
32mm
1.26"
Z axis:
1μm
0.04 Mil
X axis :
10μm
0.39 Mil
Approx. 80 μm x 46 mm
3.12 Mil x 1.81"
±0.1% of F.S.
II
LJ-G200
Long-range
Z axis:
200 ± 48mm
7.87 ± 1.89 "
X axis :
62mm
2.44"
Z axis:
2μm
0.08 Mil
X axis :
20μm
0.79 Mil
Approx. 180 μm x 70 mm
7.02 Mil x 2.76"
±0.1% of F.S.
II
NEW
LK-G 5000 Series
Learn More
LK-H020
Focused Spot
20 mm ± 3 mm
0.79" ± 0.12"
0.02 μm
0.0008 Mil
ø25 μm
ø0.98 Mil
±0.02% of F.S.
IIIa
LK-H022
II
LK-H025
Wide Spot
25 μm×1400 μm
0.98x55.12 Mil
±0.02%of F.S.
IIIa
LK-H027
II
LK-H050
Focused Spot
50 mm ± 10 mm
1.97" ± 0.39"
0.025 μm
0.001 Mil
ø50 μm
ø1.97 Mil
±0.02% of F.S.
IIIa
LK-H052
II
LK-H055
Wide Spot
50 μm×2000 μm
1.97x78.74 Mil
±0.02% of F.S.
IIIa
LK-H057
II
LK-H080
Focused Spot
80 mm ± 18 mm
3.15" ± 0.71
0.1 μm
0.004 Mil
ø70 μm
ø2.76 Mil
±0.02% of F.S.
IIIa
LK-H082
II
LK-H085
Wide Spot
70 μm×2500 μm
2.76x98.43 Mil
±0.02% of F.S.
IIIa
LK-H087
II
LK-H150
Focused Spot
150 mm ± 40 mm
5.91" ± 1.57"
0.25 μm
0.01 Mil
ø120 μm
ø4.72 Mil
±0.02% of F.S.
IIIa
LK-H152
II
LK-H155
Wide Spot
120 μm×4200 μm
4.72x165.35 Mil
±0.02% of F.S.
IIIa
LK-H157
II
LK-H008W
Mirror
8 mm ± 0.5 mm
0.32" ± 0.02"
0.005 μm
0.0002 Mil
20 μm × 550 μm
0.79x21.65 Mil
±0.05% of F.S.
II
LK-H008
ø20 μm
ø0.79 Mil
LK-H027K
16.1 mm ± 2.8 mm
0.63" ± 0.11"
0.02 μm
0.0008 Mil
25 μm ×1400μm
0.98x55.12 Mil
±0.02% of F.S.
LK-H022K
ø25 μm
ø0.98 Mil
LK-H057K
46.3 mm ± 5.2 mm
1.82" ± 0.20"
0.025 μm
0.001 Mil
50 μm × 2000 μm
1.97x78.74 Mil
±0.02% of F.S.
LK-H052K
ø50 μm
ø1.97 Mil
LK-G Series
Learn More
LK-G10
Super precision
10 ±1 mm
0.39" ± 0.04"
0.01 μm
0.0004 Mil
20 μm
0.79Mil
±0.03%
of F.S.
II
LK-G15
20 x 500 μm
0.78 x 0.20 Mil
LK-G32
High accuracy
30 ±5 mm
1.18" ± 0.24"
0.05 μm
0.002 Mil
30 μm
1.17Mil
±0.05%
of F.S.
II
LK-G37
30 x 500 μm
1.17 x33.15 Mil
LK-G152
Long distance
150 ±40 mm
5.91
" ± 1.57"
0.5 μm
0.02 Mil
1.95 Mil
120 μm
4.68Mil
±0.05%
of F.S.
II
LK-G157
120 x 1700 μm
4.68 x6.63 Mil
LT-9000 Series
Learn More
LT-9011M/
LT-9011
High accuracy
6 ±0.3 mm
0.24" ± 0.01"
0.3 μm
0.01 Mil
ø 2μm
ø 0.08Mil
±0.5%
of F.S.
IIa
LT-9031M/
LT-9031
Long distance
30 ±1 mm
1.18" ±0.04"
ø 7μm
ø 0.27Mil
±0.3%
of F.S.
IIa
LK/LK-2500 Series
Learn More
LK-2501
High precision
350 ±100 mm
13.78" ±3.94"
10 μm
0.39 Mil
ø 0.7 mm
0.03"
±0.1%
of F.S.
II
LK-2503
Long range
500 ±250 mm
19.69" ±9.84"
50 μm
1.95 Mil
ø 0.3 mm
0.01"
±0.1%
of F.S.
II
LK-011
Compact high-accuracy
(Normal)
10mm±1mm
0.39" ±0.04"
0.1 μm
0.004 Mil
ø 20 μm
0.78Mil
±0.1%
of F.S.
II
(Mirror surface)
7.0mm±0.9mm
0.27" ±0.03"
LK-031
High-precision
30mm±5mm
1.18" ±0.20"
1 μm
0.04 Mil
ø 30 μm
1.71Mil
±0.1%
of F.S.
II
LK-036
ø 30 x 850 μm
1.17 x 33.2Mil
LK-081
Standard
80mm±15mm
3.12" ±0.6"
3 μm
0.12 Mil
ø 70 μm
2.73Mil
±0.25%
of F.S.
II
LK-086
ø 70 x 1100 μm
2.73 x 42.9Mil
LB-1000W Series
Learn More
LB-1001W
High resolution
40 ±5 mm
1.57" ±0.24"
2 μm
0.08 Mil
1x2 mm
0.04" x 0.08"
±0.25%
of F.S.
IIa
LB-1101W
Standard
80 ±15 mm
3.15" ±0.59"
8 μm
0.31 Mil
1x2 mm
0.04" x 0.08"
±0.25%
of F.S.
IIa
LB-1201W
Long range
300 ±100 mm
11.8" ±3.94"
50 μm
1.95 Mil
1.2x2.5 mm
0.05" x 0.1"
±0.4%
of F.S.
IIb
–
RD Series
Learn More
RD-50E
NPN Interface
–
±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
–
–
–
–
RD-50R
RS-232C Interface
–
±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
–
–
–
–
Spectral Interferometer
Target
Model
Features
Measuring distance / range
Resolution
Smallest spot size
Linearty
FDA Laser Class
All
Objects
SI-F
Series
Learn More
SI-F01
Micro-head type
0.05 to 1.1 mm
0.002" to 0.04"
0.001 μm
0.00004 mil
ø20 μm
ø0.79 mil
±0.2 μm ±0.008 mil
I
SI-F10
Long distance type
11.3 to 12.35 mm
0.04" to 0.49"
0.01 μm
0.0004 mil
ø40 μm
ø1.57 mil
±0.3 μm ±0.01 mil
I
SI-F80
Thickness measurement type
0.05 to 1.1 mm
0.002" to 0.04"
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")
0.001 μm
0.00004 mil
ø20 μm
ø0.79 mil
±0.2 μm ±0.008 mil
I
SI-F80R
Series
Learn More
SI-F80R
Wafer thickness measurement type
10 to 310 μm
0.39 mil to 12.2 mil
(when n=3.5)
0.001 μm
0.00004 mil
ø25 μm
ø0.98 mil
±0.1 μm ±0.004 mil (when n=3.5)
I
Optical Micrometer
Target
Model
Features
Shape
Measuring range
T-to-R distance
Light source
FDA
Laser
class
All Objects
TM-3000 Series
Learn More
TM-065
High accuracy
Wide range
0.5 to 65 mm
0.02" to 2.56"
270 mm
GaN green LED
–
TM-040
High speed
Wide range
0.3 to 3 0mm
0.01" to 1.18"
180 mm
TM-006
High speed
Super fine
0.04 to 6 mm
0.002" to 0.24"
60 mm
LS-7000 Series
Learn More
LS-7070M/
LS-7070
High accuracy
Wide range
0.5 to 65 mm
0.02" to 2.56"
200 to 300 mm
7.87" to 11.81"
GaN green LED
–
LS-7030M/
LS-7030
High speed
Wide range
0.3 to 3 0mm
0.01" to 1.18"
120 to 200 mm
4.73" to 7.88"
LS-7010M/
LS-7010
High speed
Super fine
0.04 to 6 mm
0.002" to 0.24"
60 mm (fixed)
2.34"
NEW
IG
Series
Learn More
IG-010
High
Accuracy
10 mm
0.39"
0 to 1000 mm
39.37"
Visible light
semiconductor
laser
(Wavelength:
660 nm)
I
IG-028
28 mm
1.10"
0 to 1500 mm
59.06"
LS-5000 Series
Learn More
LS-5041
High Accuracy
0.2 to 40 mm
0.01" to 1.57"
120 to 200 mm
4.73" to 7.88"
Visible red
semiconductor
laser
II
LS-5121
High Accuracy
Wide range
0.8 to 120 mm
0.03" to 4.72"
300 to 500 mm
11.82
" to 19.7"
Inductive Displacement Sensor
Target
Model
Features
Shape
Measuring distance/
measuring range
Resolution
Smallest
spot size
Linearty
FDA
Laser
class
Ferrous
metals
EX-V Series
Learn More
EX-305V
Iron
1 mm
0.04"
0.4 μm
0.016Mil
–
±0.3%
of F.S.
–
EX-110V
2 mm
0.08"
EX-416V
5 mm
0.20"
1 μm
0.04Mil
EX-305V
10 mm
0.39"
2 μm
0.08Mil
EX-305V
4 mm
0.16"
1 μm
0.04Mil
All
Metals
EX-500 Series
Learn More
EX-008V
Iron
Brass
Copper
Stainless steel
Aluminum
1 mm
0.04"
±0.03%
of F.S.
–
±0.3%
of F.S.
–
EX-008V
2 mm
0.08"
EX-016V
5 mm
0.20"
EX-022V
10 mm
0.39"
Ferrous
metals
EX-200 Series
Learn More
EX-305V
Iron
1 mm
0.04"
±0.04%
of F.S.
–
±1%
of F.S.
–
EX-110V
2 mm
0.08"
EX-416V
5 mm
0.20"
EX-422V
10 mm
0.39"
–
RD Series
Learn More
RD-50E
NPN Interface
–
±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
–
–
–
–
RD-50R
RS-232C Interface
–
±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
–
–
–
–
Contact Sensor
Model
Type of accuracy
Measuring force
Measuring
range
Resolution
Accuracy
Measuring force
(Value at center of measuring range.)
Downward
mounting
Side
mounting
Upward
mounting
GT2
Series
Learn More
GT2-H12K
High-precision
Standard
12 mm
0.47"
0.1 μm
0.004 Mil
1 μm
0.04 Mil
1.0 N
0.9 N
0.8 N
GT2-H12KL
Low
stress
0.4 N
0.3 N
0.2 N
GT2-H12
General-purpose
Standard
0.5 μm
0.02 Mil
2 μm
0.08 Mil
1.0 N
0.9 N
0.8 N
GT2-H12L
Low
stress
0.4 N
0.3 N
0.2 N
GT2-H32
General-purpose
Standard
32 mm
1.26"
0.5 μm
0.02 Mil
3 μm
0.12 Mil
2.1 N
1.8 N
1.5 N
GT2-H32L
Low
stress
1.2 N
0.9 N
0.6 N
GT2-H50
Standard
50 mm
1.97"
3.5 μm
0.14 Mil
3.2 N
2.8 N
2.4 N
NEW
GT2
Series
Air Push Type
Learn More
GT2-A12K
High-precision
Standard
12 mm
0.47"
0.1 μm
0.004 Mil
1 μm
0.04 Mil
1.2 N
1.1 N
1.0 N
GT2-A12KL
Low
stress
0.4 N
0.3 N
0.2 N
GT2-A12
General-purpose
Standard
0.5 μm
0.02 Mil
2 μm
0.08 Mil
1.2 N
1.1 N
1.0 N
GT2-A12L
Low
stress
0.4 N
0.3 N
0.2 N
GT2-A32
Standard
32 mm
1.26"
0.5 μm
0.02 Mil
3 μm
0.12 Mil
2.1 N
1.8 N
1.5 N
GT2-A50
50 mm
1.97"
3.5 μm
0.14 Mil
3.2 N
2.8 N
2.4 N
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