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Laser Displacement Sensors from KEYENCE

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Keyence Measurement Systems for All Applications

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Image Measurement System

Model Mode Field of view Repetition Accuracy Measurement
accuracy
Light receiving lens
NEW
IM-6500 Series

IM-6000 Series
Learn More
IM-6010 Wide-field
measurement mode
ø100 mm ø3.94" ±1 μm
±0.04Mil
±5 μm
±0.2Mil
Double
telecentric
lens
High-precision
measurement mode
- - -
IM-6020 Wide-field
measurement mode
ø100 mm ø3.94" ±1 μm
±0.04Mil
±5 μm
±0.2Mil
High-precision
measurement mode
ø25 mm ø0.98" ±0.5 μm ±0.02Mil ±2 μm ±0.08Mil

Laser Displacement Sensor

Target Model Features Shape Measuring
distance/range
Resolution Smallest
spot size
Linearty FDA
Laser
class
All
Objects
LJ-G Series
LJ-G Series

Learn More
LJ-G015K Ultra high-accuracy regular reflection LJ-G Series Ultra high-accuracy regular reflection Z axis: 15 ± 2.3mm
0.59 ± 0.09"
X axis : 7mm
0.28"
Z axis: 0.2μm
0.008 Mil
X axis : 2.5μm
0.1 Mil
Approx. 32 μm x 12 mm
1.26 Mil x 0.47"
±0.1% of F.S. II
LJ-G015 Ultra high-accuracy LJ-G Series Ultra high-accuracy Z axis: 15 ± 2.6mm
0.59 ± 0.1"
X axis : 7mm
0.28"
LJ-G030 High-accuracy LJG Series High-accuracy Z axis: 30 ± 10mm
1.18 ± 0.39"
X axis : 22mm
0.87"

Z axis: 1μm
0.04 Mil
X axis : 5μm
0.2 Mil

Approx. 40 μm x 25 mm
1.56 Mil x 0.98"
±0.1% of F.S. II
LJ-G080 Mid-range LJ-G Series Mid-range Z axis: 80 ± 23mm
3.15 ± 0.91 "
X axis : 32mm
1.26"
Z axis: 1μm
0.04 Mil
X axis : 10μm
0.39 Mil
Approx. 80 μm x 46 mm
3.12 Mil x 1.81"
±0.1% of F.S. II
LJ-G200 Long-range LK-G Series Long-range Z axis: 200 ± 48mm
7.87 ± 1.89 "
X axis : 62mm
2.44"
Z axis: 2μm
0.08 Mil
X axis : 20μm
0.79 Mil
Approx. 180 μm x 70 mm
7.02 Mil x 2.76"
±0.1% of F.S. II
NEW
LK-G 5000 Series

LK-G5000 Series
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LK-H020 Focused Spot 20 mm ± 3 mm
0.79" ± 0.12"
0.02 μm
0.0008 Mil
ø25 μm
ø0.98 Mil
±0.02% of F.S. IIIa
LK-H022 II
LK-H025 Wide Spot 25 μm×1400 μm
0.98x55.12 Mil
±0.02%of F.S. IIIa
LK-H027 II
LK-H050 Focused Spot 50 mm ± 10 mm
1.97" ± 0.39"
0.025 μm
0.001 Mil
ø50 μm
ø1.97 Mil
±0.02% of F.S. IIIa
LK-H052 II
LK-H055 Wide Spot 50 μm×2000 μm
1.97x78.74 Mil
±0.02% of F.S. IIIa
LK-H057 II
LK-H080 Focused Spot 80 mm ± 18 mm
3.15" ± 0.71
0.1 μm
0.004 Mil
ø70 μm
ø2.76 Mil
±0.02% of F.S. IIIa
LK-H082 II
LK-H085 Wide Spot 70 μm×2500 μm
2.76x98.43 Mil
±0.02% of F.S. IIIa
LK-H087 II
LK-H150 Focused Spot 150 mm ± 40 mm
5.91" ± 1.57"
0.25 μm
0.01 Mil
ø120 μm
ø4.72 Mil
±0.02% of F.S. IIIa
LK-H152 II
LK-H155 Wide Spot 120 μm×4200 μm
4.72x165.35 Mil
±0.02% of F.S. IIIa
LK-H157 II
LK-H008W Mirror 8 mm ± 0.5 mm
0.32" ± 0.02"
0.005 μm
0.0002 Mil
20 μm × 550 μm
0.79x21.65 Mil
±0.05% of F.S. II
LK-H008 ø20 μm
ø0.79 Mil
LK-H027K 16.1 mm ± 2.8 mm
0.63" ± 0.11"
0.02 μm
0.0008 Mil
25 μm ×1400μm
0.98x55.12 Mil
±0.02% of F.S.
LK-H022K ø25 μm
ø0.98 Mil
LK-H057K 46.3 mm ± 5.2 mm
1.82" ± 0.20"
0.025 μm
0.001 Mil
50 μm × 2000 μm
1.97x78.74 Mil
±0.02% of F.S.
LK-H052K ø50 μm
ø1.97 Mil
LK-G Series
LK-G Series
Learn More
LK-G10 Super precision LK-G Series Super precision 10 ±1 mm
0.39" ± 0.04"
0.01 μm
0.0004 Mil
20 μm
0.79Mil
±0.03%
of F.S.
II
LK-G15 20 x 500 μm
0.78 x 0.20 Mil
LK-G32 High accuracy LK-G Series High accuracy 30 ±5 mm
1.18" ± 0.24"
0.05 μm
0.002 Mil
30 μm
1.17Mil
±0.05%
of F.S.
II
LK-G37 30 x 500 μm
1.17 x33.15 Mil
LK-G152 Long distance LK-G Series Long distance 150 ±40 mm
5.91" ± 1.57"
0.5 μm
0.02 Mil
1.95 Mil
120 μm
4.68Mil
±0.05%
of F.S.
II
LK-G157 120 x 1700 μm
4.68 x6.63 Mil
LT-9000 Series
LT-9000 Series
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LT-9011M/
LT-9011
High accuracy LK-2500 Series Hign accuracy 6 ±0.3 mm
0.24" ± 0.01"
0.3 μm
0.01 Mil
ø 2μm
ø 0.08Mil
±0.5%
of F.S.
IIa
LT-9031M/
LT-9031
Long distance LK-2500 Series Long distance 30 ±1 mm
1.18" ±0.04"
ø 7μm
ø 0.27Mil
±0.3%
of F.S.
IIa
LK/LK-2500 Series
LK-2500 Series
Learn More
LK-2501 High precision LK-2500 Series High precision 350 ±100 mm
13.78" ±3.94"
10 μm
0.39 Mil
ø 0.7 mm
0.03"
±0.1%
of F.S.
II
LK-2503 Long range LK-2500 Series Long range 500 ±250 mm
19.69" ±9.84"
50 μm
1.95 Mil
ø 0.3 mm
0.01"
±0.1%
of F.S.
II
LK-011 Compact high-accuracy LK Series Compact high-accuracy (Normal)
10mm±1mm
0.39" ±0.04"
0.1 μm
0.004 Mil
ø 20 μm
0.78Mil
±0.1%
of F.S.
II
(Mirror surface)
7.0mm±0.9mm
0.27" ±0.03"
LK-031 High-precision LK Series High-precision 30mm±5mm
1.18" ±0.20"
1 μm
0.04 Mil
ø 30 μm
1.71Mil
±0.1%
of F.S.
II
LK-036 ø 30 x 850 μm
1.17 x 33.2Mil
LK-081 Standard LK Series Standard 80mm±15mm
3.12" ±0.6"
3 μm
0.12 Mil
ø 70 μm
2.73Mil
±0.25%
of F.S.
II
LK-086 ø 70 x 1100 μm
2.73 x 42.9Mil
LB-1000W Series
LB-1000W Series
Learn More
LB-1001W High resolution LB-1000W Series hign resolution 40 ±5 mm
1.57" ±0.24"
2 μm
0.08 Mil
1x2 mm
0.04" x 0.08"
±0.25%
of F.S.
IIa
LB-1101W Standard LB-1000W Series Standard 80 ±15 mm
3.15" ±0.59"
8 μm
0.31 Mil
1x2 mm
0.04" x 0.08"
±0.25%
of F.S.
IIa
LB-1201W Long range LB-1000W Series Long range 300 ±100 mm
11.8" ±3.94"
50 μm
1.95 Mil
1.2x2.5 mm
0.05" x 0.1"
±0.4%
of F.S.
IIb
RD Series
RD Series
Learn More
RD-50E NPN Interface ±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
RD-50R RS-232C Interface ±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)

Spectral Interferometer

Target Model Features Measuring distance / range Resolution Smallest spot size Linearty FDA Laser Class
All
Objects
SI-F
Series

SI Series
Learn More
SI-F01 Micro-head type 0.05 to 1.1 mm
0.002" to 0.04"
0.001 μm
0.00004 mil
ø20 μm
ø0.79 mil
±0.2 μm ±0.008 mil I
SI-F10 Long distance type 11.3 to 12.35 mm
0.04" to 0.49"
0.01 μm
0.0004 mil
ø40 μm
ø1.57 mil
±0.3 μm ±0.01 mil I
SI-F80 Thickness measurement type 0.05 to 1.1 mm
0.002" to 0.04"
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")
0.001 μm
0.00004 mil
ø20 μm
ø0.79 mil
±0.2 μm ±0.008 mil I
SI-F80R
Series

SI-F80R Series
Learn More
SI-F80R Wafer thickness measurement type 10 to 310 μm
0.39 mil to 12.2 mil
(when n=3.5)
0.001 μm
0.00004 mil
ø25 μm
ø0.98 mil
±0.1 μm ±0.004 mil (when n=3.5) I

Optical Micrometer

Target Model Features Shape Measuring range
T-to-R distance Light source

FDA
Laser
class

All Objects TM-3000 Series
TM-3000 Series
Learn More
TM-065 High accuracy
Wide range
LS-7000 Series High speed super fine 0.5 to 65 mm
0.02" to 2.56"
270 mm GaN green LED
TM-040 High speed
Wide range
LS-7000 Series High speed wide range 0.3 to 3 0mm
0.01" to 1.18"
180 mm
TM-006 High speed
Super fine
LS-7000 Series High speed super fine 0.04 to 6 mm
0.002" to 0.24"
60 mm
LS-7000 Series
LS-7000 Series
Learn More
LS-7070M/
LS-7070
High accuracy
Wide range
LS-7000 Series High speed super fine 0.5 to 65 mm
0.02" to 2.56"
200 to 300 mm
7.87" to 11.81"
GaN green LED
LS-7030M/
LS-7030
High speed
Wide range
LS-7000 Series High speed wide range 0.3 to 3 0mm
0.01" to 1.18"
120 to 200 mm
4.73" to 7.88"
LS-7010M/
LS-7010
High speed
Super fine
LS-7000 Series High speed super fine 0.04 to 6 mm
0.002" to 0.24"
60 mm (fixed)
2.34"
NEW
IG
Series

IG Series
Learn More
IG-010 High
Accuracy
IG Series High Accuracy 10 mm
0.39"
0 to 1000 mm 39.37" Visible light
semiconductor
laser
(Wavelength:
660 nm)
I
IG-028 IG Series High Accuracy 28 mm
1.10"
0 to 1500 mm 59.06"
LS-5000 Series
LS-5000 Series
Learn More
LS-5041 High Accuracy
LS-5000 Series High accuracy 0.2 to 40 mm
0.01" to 1.57"
120 to 200 mm
4.73" to 7.88"
Visible red
semiconductor
laser
II
LS-5121
High Accuracy
Wide range
LS-5000 Series High accuracy wide range 0.8 to 120 mm
0.03" to 4.72"
300 to 500 mm
11.82" to 19.7"

Inductive Displacement Sensor

Target Model Features Shape Measuring distance/
measuring range
Resolution Smallest
spot size
Linearty

FDA
Laser
class

Ferrous
metals
EX-V Series
EX-EX-200 Series Inductive Series Inductive
Learn More
EX-305V Iron EX-V Series 1 mm
0.04"
0.4 μm
0.016Mil
±0.3%
of F.S.
EX-110V 2 mm
0.08"
EX-416V 5 mm
0.20"
1 μm
0.04Mil
EX-305V 10 mm
0.39"
2 μm
0.08Mil
EX-305V 4 mm
0.16"
1 μm
0.04Mil
All
Metals
EX-500 Series
EX-500 Series
Learn More
EX-008V Iron
Brass
Copper
Stainless steel
Aluminum
EX-500 Series 1 mm
0.04"
±0.03%
of F.S.
±0.3%
of F.S.
EX-008V 2 mm
0.08"
EX-016V 5 mm
0.20"
EX-022V 10 mm
0.39"
Ferrous
metals
EX-200 Series
EX-200 Series
Learn More
EX-305V Iron EX-200 Series 1 mm
0.04"
±0.04%
of F.S.
±1%
of F.S.
EX-110V 2 mm
0.08"
EX-416V 5 mm
0.20"
EX-422V 10 mm
0.39"
RD Series
RD Series
Learn More
RD-50E NPN Interface ±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)
RD-50R RS-232C Interface ±5 VDC, ±10 VDC, 4 to 20 mA DC (selectable)

Contact Sensor

Model Type of accuracy Measuring force Measuring
range
Resolution Accuracy Measuring force
(Value at center of measuring range.)
Downward
mounting
Side
mounting
Upward
mounting
GT2
Series

GT2 Series
Learn More
GT2-H12K High-precision Standard 12 mm 0.47" 0.1 μm
0.004 Mil
1 μm
0.04 Mil
1.0 N 0.9 N 0.8 N
GT2-H12KL

Low
stress

0.4 N 0.3 N 0.2 N
GT2-H12 General-purpose Standard 0.5 μm
0.02 Mil
2 μm
0.08 Mil
1.0 N 0.9 N 0.8 N
GT2-H12L Low
stress
0.4 N 0.3 N 0.2 N
GT2-H32 General-purpose Standard 32 mm 1.26" 0.5 μm
0.02 Mil
3 μm
0.12 Mil
2.1 N 1.8 N 1.5 N
GT2-H32L Low
stress
1.2 N 0.9 N 0.6 N
GT2-H50 Standard 50 mm 1.97" 3.5 μm
0.14 Mil
3.2 N 2.8 N 2.4 N
NEW

GT2
Series
Air Push Type

GT2 Series Air Push Type
Learn More
GT2-A12K High-precision Standard 12 mm 0.47" 0.1 μm
0.004 Mil
1 μm
0.04 Mil
1.2 N 1.1 N 1.0 N
GT2-A12KL

Low
stress

0.4 N 0.3 N 0.2 N
GT2-A12 General-purpose Standard 0.5 μm
0.02 Mil
2 μm
0.08 Mil
1.2 N 1.1 N 1.0 N
GT2-A12L Low
stress
0.4 N 0.3 N 0.2 N
GT2-A32 Standard 32 mm 1.26" 0.5 μm
0.02 Mil
3 μm
0.12 Mil
2.1 N 1.8 N 1.5 N
GT2-A50 50 mm 1.97" 3.5 μm
0.14 Mil
3.2 N 2.8 N 2.4 N

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