Select a Page Below: 1. Features, Surface Scanning 2. Features, Z-axis Scanning 3. Features, X-axis Scanning 4. Features, Easy Setup Functions 5. Features, New Features 6. Features, Long Range Type 7. Applications 8. Specifications, Overview 9. Dimensions, Overview

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Z-Axis Surface Scanning

Best in Class Performance with the Specifications to Back it Up.

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Excellent Resolution of 0.0004 Mil (0.01 μm) High-accuracy Measurement Method Uses the Confocal Principle and Tuning Fork The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, color, or angle of the target.

Improved Performance The coaxial optical system improves measurement performance

When Focus is not Obtained On the Target Surface	When Focus is Obtained on the Target Surface
A small amount of received light passes through the pinhole.	All of the received light passes through the pinhole.

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